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1 lithography
(мікро) літографія. Процес перенесення малюнка на поверхню пластини за допомогою світлового випромінювання (photolithography), потоку електронів або рентгенівського випромінювання (X-ray lithography) - charged-particle lithography
- contact lithography
- contactless lithography
- contrast-enhanced lithography
- deep-UV lithography
- direct growth lithography
- direct-write electron-beam lithography
- dot lithography
- dual-surface lithography
- electron-beam lithography
- electron lithography
- excimer laser lithography
- fine-line lithography
- focused ion-beam lithography
- full-wafer lithography
- bard-contact lithography
- high-resolution lithography
- high-voltage EB lithography
- holographic lithography
- hybrid lithography
- i-line lithography
- ion-beam lithography
- laser-basedlithography
- laserlithography
- lift-off lithography
- mask lithography
- maskless lithography
- micrometer micron lithography
- micron lithography
- molecular-level lithography
- optical lithography
- positive-resist projection lithography
- precise registration lithography
- projection lithography
- proximity lithography
- raster-scan electron-beam lithography
- resistless lithography
- scaled-down lithography
- scanning electron-beam lithography
- scanning ion-beam lithography
- self-aligned dual-surface lithography
- soft lithography
- soft-contact lithography
- step-and-repeat lithography
- step-on-wafer lithography
- stepper lithography
- submicron lithography
- synchrotron-radiationlithography
- synchrotronlithography
- ultraviolet lithography
- vector-scan electron-beam lithography
- wafer lithography
- wafer-stepper lithography
- write e-beam lithography
- X-ray lithographyEnglish-Ukrainian dictionary of microelectronics > lithography
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2 operation
1) робота; функціонування 2) операція; дія 3) режим (роботи) (див. т-ж mode) - avalanche operation
- batch operation
- bipolar operation
- cassette-to-cassette operation
- concurrent реripheral operation
- continuous-wave operation
- depletion-mode operation
- enhancement-mode operation
- fault-free operation
- hands-off operation
- high-level signal operation
- high-speed operation
- input/output operation
- large-signal operation
- lift-off patterning operation
- logical operation
- low-level signal operation
- manual operation
- manual off-line operation
- memory operation
- pulsed operation
- read-out operation
- semiautomated operation
- small-signal operation
- step-and-repeat operation
- storage operation
- write operationEnglish-Ukrainian dictionary of microelectronics > operation
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